This research focuses on the development of multi-input, multi-output control technique for wafer heating systems. The heating system utilizes multiple heating lamps as heat sources and multiple thermocouples for temperature sensing. The objective is to establish a control algorithm that takes temperature measurements from the thermocouples as inputs and controls the voltage supplied to the heating lamps. This algorithm is implemented on a personal computer through A\/D and D\/A interfaces to ensure uniform and consistent temperature increase and regulation at each sensing point. The control framework established in this study offers a systematic design approach for heating systems and allows for quantifying the control performance during the design phase. This framework is not limited to a specific equipment but can be applied to various multi-input, multi-output heating systems.<\/p>\n","protected":false},"excerpt":{"rendered":"
This research focuses on the development of multi-input, multi-output control technique for wafer heating systems. The heating system utilizes multiple heating lamps as heat sources and multiple thermocouples for temperature sensing. The objective is to establish a control algorithm that takes temperature measurements from the thermocouples as inputs and controls the voltage supplied to the …<\/p>\n